Grating sets

Company ScanSens manufactures and offers several different grating sets.


TGS1

Grating set for Z-axis SPM calibration with three different height range - 20nm, 110nm, 520nm.

TGS2

Grating set for SPM lateral and vertical calibration, detection of lateral non-linearity, hysteresis, creep, and cross-coupling effects, determination of the tip shape.

TGS1_PTB

Calibration grating set TGS1 (consists of three gratings TGZ1, TGZ2, TGZ3) with PTB tracable certificate.

TGSFull

Full set of calibration standards for SPM lateral and vertical calibration (including submicron calibration and simultaneuos calibration in X, Y and Z directions) , detection of lateral non-linearity, hysteresis, creep, and cross-coupling effects, determination of the tip shape.

TGS_Cert

Set of calibration standards for SPM with International Calibration Cetficates. Intended for lateral and vertical calibration (including submicron calibration and simultaneuos calibration in X, Y and Z directions) , detection of lateral non-linearity, hysteresis, creep, and cross-coupling effects, determination of the tip shape.

TGS1F

Grating set for Z-axis SPM calibration with four different height range - 20nm, 110nm, 520nm, 1400nm.
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